High resolution Scanning Electron Microscope FEI Verios 460L
Ondřej Man
The Verios 460L is an unconventional SEM. Through clever design, the Verios 460L allows for ultra-high resolution imaging at low energy on insulating samples with no conductive coating. The Verios 460L is equipped with a wide array of low and high energy electron detectors including a transmission detector and an energy dispersive X-ray spectrometer.
Electron column/optics specifications
| Electron column type | Elstar UC |
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| Electron source type | Schottky FEG with monochromator |
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| Imaging modes | field free |
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| XHR immersion |
| EDS optimized |
| Beam deceleration (stage bias – 20 V to – 4 kV |
| Probe current | 0.8 to 100 nA |
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| Landing energy | 20 eV to 30 keV |
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Detectors available
| Imaging detectors | Analytical detectors | Others |
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| in-lens SE detector (TLD-SE) | energy dispersive spectrometer (EDS) | IR camera for viewing sample/column |
| in-lens BSE detector (TLD-BSE) | wavelength dispersive spectrometer (WDS) | Chamber mounted Nav-Cam+ |
| in-column SE detector (ICD) | electron backscatter diffraction detector (EBSD) | Integrated beam current measurement |
| in-column BSE detector (MD) |
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| Everhart-Thornley SE detector (ETD) |
| forward-scattered electrons detector (FSD) |
| Retractable low voltage, solid-state backscatter electron detector (DBS) |
| Retractable STEM detector with BF/DF/HAADF segments |
Resolution
| Top resolution | Conditions |
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| 0.6 nm | 30 kV (STEM) |
| 0.6 nm | 15 – 2 kV |
| 0.7 nm | 1 kV |
| 1.0 nm | 500 V (ICD) |
Sample stage
| Stage type | Ultra high precision 5-axes piezo-motorized stage |
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| Axis | Maximum movement [mm] |
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| X, Y | 100 |
| Z | 20 |
| tilt | – 10 ° to + 60 ° |
| rotation | 720 ° stroke |
| Positioning accuracy/repeatability |
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| X, Y repeatability 0.5 μm |
| X, Y accuracy < 1.5 μm (85 % tolerance interval) |
| Mechanically tilt eucentric stage with < 5 μm image motion when tilting 0 ° to 52 ° |
Maximum sample sizes
| Maximum size | 100 mm diameter with full rotation |
| Maximum sample thickness (via loadlock) | 15 mm incl. holder |
| Maximum sample thickness (via chamber door) | 27.8 mm incl. sample holder |
| Weight | 200 g (incl. holder) |
| Please avoid introduction of your samples via chamber door as much as possible! |
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Installed utility devices
| Plasma cleaner (mounted on the chamber) |
| Cryo cleaner (mounted on the chamber) |
| Fully motorized loadlock |
Analytical detectors specifications
| Detector | Parameter | Specified value |
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| EDS | Detector type | EDAX SDD Octane Super |
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| Detector chip area | 60 mm2 |
| Energy resolution-specified | 129 eV @ MnKα |
| Energy resolution-measured | 131.2 eV @ MnKα |
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| EBSD | Detector type | EDAX DigiView IV |
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| Detector camera resolution | 1392 (H) x 1040 (V) x 12 bits |
| Selectable Binning Modes | 1×1 |
| 1×2 |
| 2×2 |
| 4×4 |
| 8×8 |
| 10×10 |
| Signal / Noise Ratio | > 65 dB |
| Data collection rate | up to 150 indexed pps |
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| WDS | Detector type | EDAX TEXS HP XM 4 |
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| Installed crystals |
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| Crystal type | Interplanar distance 2d [nm] |
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| PV7000/38 | 4.01 |
| PV7000/33 | 75.47 |
| PV7000/35 | 60.491 |
| PV7000/43 | 29.769 |
| PV7000/36 | 8.721 |
| Energy resolution |
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| Element / line | Resolution – specified [eV] |
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| C / Kα | 13 |
| N / Kα | 18 |
| O / Kα | 17 |
| Cu / Lα | 30 |
| Al / Kα | 28 |
| Si / Kα | 6 |
| Cu / Kα | 75 |
+420 54114 9207 | 
nano@ceitec.vutbr.cz
