+420 54114 9207 | 
nano@ceitec.vutbr.cz
The VASE is most accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, metals, multi-layers, and more. It combines high accuracy and precision with a wide spectral range from 193 to 2000nm. Variable wavelength and angle of incidence allow flexible measurement capabilities.
|* Reflection and Transmission Ellipsometry| |
|* Generalized Ellipsometry | |
|* Reflectance ® intensity | |
|* Transmittance (T) intensity | |
|* Cross-polarized R/T | |
|* Depolarization | |
|* Scatterometry | |
|* Mueller-matrix | |
| Spectral range | 193 – 2000 nm |
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| Retarder | yes |
| Rotating analyser | |
| Sample holder | vertical |
| Angle of incidence | 35° – 90° |
| Monochromator | HS 190 (Woollam) |
| Focusing probes | Decreases the light beam to 200 microns in diameter |
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