+420 54114 9207 | 
nano@ceitec.vutbr.cz
Multilayers characterization, resist thickness measurement mainly. Interval of measure film thickness from 10 nm up to 100 um.
| Spectral Range | 250 – 1100 nm |
|---|---|
| Total thickness range | 10 nm – 100 um |
| Resolution | 0.1 nm |
| Repetability | 0.3 nm |
| Absolute accuracy | < 1 % (100 nm – 10 um) |
| Number of layers | up to 10 layers |
| Distance with fiber | 1 – 5 mm |
| Distance with optic | 5 – 100 mm |
| Angle with optic | 90° (nominal incidence) |
| Spot size | 400 um (optional 100/200 um |
| Microspot | 1 – 20 um with microscope 10× / 20× / 50× magnification and MFA – Adapter |
| Fiber length | 2 m (other lengths available on request) |
